JPH0532534Y2 - - Google Patents
Info
- Publication number
- JPH0532534Y2 JPH0532534Y2 JP5975788U JP5975788U JPH0532534Y2 JP H0532534 Y2 JPH0532534 Y2 JP H0532534Y2 JP 5975788 U JP5975788 U JP 5975788U JP 5975788 U JP5975788 U JP 5975788U JP H0532534 Y2 JPH0532534 Y2 JP H0532534Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- gas
- inert gas
- vacuum
- gas replacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 75
- 239000011261 inert gas Substances 0.000 claims description 53
- 230000006837 decompression Effects 0.000 claims description 49
- 238000007738 vacuum evaporation Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 13
- 238000005086 pumping Methods 0.000 claims description 5
- 238000001771 vacuum deposition Methods 0.000 description 17
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000008929 regeneration Effects 0.000 description 3
- 238000011069 regeneration method Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975788U JPH0532534Y2 (en]) | 1988-05-02 | 1988-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975788U JPH0532534Y2 (en]) | 1988-05-02 | 1988-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01164759U JPH01164759U (en]) | 1989-11-17 |
| JPH0532534Y2 true JPH0532534Y2 (en]) | 1993-08-19 |
Family
ID=31285503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5975788U Expired - Lifetime JPH0532534Y2 (en]) | 1988-05-02 | 1988-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0532534Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4681640B2 (ja) * | 2008-09-30 | 2011-05-11 | 積水化学工業株式会社 | 表面処理方法 |
-
1988
- 1988-05-02 JP JP5975788U patent/JPH0532534Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01164759U (en]) | 1989-11-17 |
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